產品優勢

  1. 增加設備使用率(高達35%)

  2. 探頭產量的提高

  3. 降低總粒子計數

  4. 無化學藥劑/溶劑

  5. 現場就地清洗(無需拆解機器)

  6. 無二次廢物的產生

  7. 全程乾洗

  8. 非研磨性(無損壞設備/模具)

  9. 減少停機時間

  10. 環保快速收回投資

應用層面

  1. 去除積聚在CVD反應器

  2. 擴散原件

  3. 拋光原件

  4. 光原件

  5. 蝕刻版原件



生產製造半導體設備及多晶矽的廠商,對於設備的清理,大多採取各種不同的方式及工具。在生產設備上如果發生了沉積現象,必須清理的非常的乾淨才可再繼續運作生產。其傳統方式中以溶劑、強酸、鋼絲刷或刮刀主要為主。

PolarTech乾冰清洗技術解決了半導體產業在設備清理上問題,採用機械手臂的作業方式做乾冰清洗。使用PolarTech乾冰清洗可降低時間和成本,並同時提高產品質量和停機時間。

乾冰清洗是全程無毒且可替代使用傳統溶劑和化學藥劑,不會對現場清潔操作的人員們造成職業傷害,環保又安全。乾冰清洗是不含任何研磨料劑,代表在清潔電子或生產設備上不會造成損壞,也對環境無二次汙染及產生二手廢料。

在現場可以直接有效且快速的清洗,無須拆卸任何設備及機器,更能夠減少成本損耗、提升產能效率。其結果是在投資回報率上得到快速的回報。















Manufacturers of semiconductor devices and polycrystalline silicon are using various solutions in their decontamination process of different tooling. Especially in production equipment where depositions occurs must be kept extremely clean to prevent contamination. Solvents, acids, wire brushing, scrapers are just some of the methods for cleaning.

PolarTech dry ice blasting provides a solution for the cleaning applications both as manual systems as well as robotic solutions. Using PolarTech technology means reducing cleaning time and costs and at the same time increasing product quality and reduced downtime in production.

PolarTech technology is a non-toxic process and minimizes or even substitutes completely the use of solvents and chemicals hence it is far safer to use for the operator and is environmentally friendly. Dry ice blasting is non-abrasive meaning you are not doing any damage to equipment or electronics. The technology is not generating secondary waste.

Faster cleaning and cleaning in-situ (no need for dismantling) means that overall cleaning costs are reduced radically.

​The result is a fast payback on your ROI.
 
 
 

 
 

​Semiconductor Industry

DRY ICE BLASTING

CLEANING TECHNOLOGY 

OF the FUTURE